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SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries - Nondestructive film thickness measurement using atomic force microscopy at ultrasonic frequencies
Crozier, Kenneth B., Yaralioglu, Goeksenin G., Degertekin, F. L., Adams, Jesse D., Minne, Stephen C., Quate, Calvin F., Al-Jumaily, Ghanim A., Duparre, Angela, Singh, BhanwarVolume:
4099
Year:
2000
Language:
english
DOI:
10.1117/12.405835
File:
PDF, 387 KB
english, 2000