SPIE Proceedings [SPIE Intelligent Systems and Smart Manufacturing - Boston, MA (Sunday 5 November 2000)] Process Imaging for Automatic Control - Shape estimation for online diameter calibration in Czochralski silicon crystal growth
Kimbel, Steven L., O'Sullivan, Joseph A., McCann, Hugh, Scott, David M.Volume:
4188
Year:
2001
Language:
english
DOI:
10.1117/12.417181
File:
PDF, 800 KB
english, 2001