SPIE Proceedings [SPIE 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Munich, Germany (Monday 13 November 2000)] 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Canary reticle: a new diagnostic for reticles and a window into the physics of ESD damage to reticles
Levit, Lawrence, Englisch, Andreas, Behringer, Uwe F. W.Volume:
4349
Year:
2001
Language:
english
DOI:
10.1117/12.425101
File:
PDF, 426 KB
english, 2001