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SPIE Proceedings [SPIE 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Munich, Germany (Monday 13 November 2000)] 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Continuous image writer with improved image quality for high-accuracy optical patterning
Paufler, Joerg, Brunn, Stefan, Koerner, Tim, Behringer, Uwe F. W.Volume:
4349
Year:
2001
Language:
english
DOI:
10.1117/12.425103
File:
PDF, 817 KB
english, 2001