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SPIE Proceedings [SPIE Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Cannes-Mandelieu, France (Wednesday 25 April 2001)] Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Design and coupled-effect simulations of CMOS micro gas sensors built on SOI thin membranes
Lu, Chih-Cheng, Udrea, Florin, Gardner, Julian W., Setiadi, D., Dogaru, T., Tsai, T. H., Covington, James A., Courtois, Bernard, Karam, Jean Michel, Levitan, Steven P., Markus, Karen W., Tay, Andrew AVolume:
4408
Year:
2001
Language:
english
DOI:
10.1117/12.425340
File:
PDF, 546 KB
english, 2001