SPIE Proceedings [SPIE Photonics West 2001 - LASE - San Jose, CA (Saturday 20 January 2001)] Laser Applications in Microelectronic and Optoelectronic Manufacturing VI - Multilevel diffractive optical element manufacture by excimer laser ablation and halftone masks
Quentel, Francois, Fieret, Jim, Holmes, Andrew S., Paineau, Sylvain, Gower, Malcolm C., Helvajian, Henry, Sugioka, Koji, Dubowski, Jan J.Volume:
4274
Year:
2001
Language:
english
DOI:
10.1117/12.432538
File:
PDF, 476 KB
english, 2001