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SPIE Proceedings [SPIE SPIE's 8th Annual International Symposium on Smart Structures and Materials - Newport Beach, CA (Sunday 4 March 2001)] Smart Structures and Materials 2001: Smart Electronics and MEMS - Performance improvement of rf MEMS capacitive switches with high-dielectric-constant materials
Yoon, Hargsoon, Sha, Yanan, Sharma, Pramod K., Vinoy, K. J., Varadan, Vijay K., Varadan, Vasundara V., Varadan, Vijay K.Volume:
4334
Year:
2001
Language:
english
DOI:
10.1117/12.436618
File:
PDF, 544 KB
english, 2001