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SPIE Proceedings [SPIE SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems - Melbourne, Australia (Monday 16 December 2002)] Nano- and Microtechnology: Materials, Processes, Packaging, and Systems - Experimental investigation of the effect of the MPL (magnetic polishing liquid) on surface finishing
Shimada, Kunio, Wu, Yongbo, Wong, Yat C., Fujita, Toyohisa, Miyazaki, Toshio, Shibayama, Atsushi, Sood, Dinesh K., Malshe, Ajay P., Maeda, RyutaroVolume:
4936
Year:
2002
Language:
english
DOI:
10.1117/12.469422
File:
PDF, 515 KB
english, 2002