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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Micromachining Technology for Micro-Optics and Nano-Optics - Additive lithography for refractive micro-optics
Pitchumani, Mahesh, Hockel, Heidi, Brown, Jeremiah, Mohammed, Waleed S., Johnson, Eric G., Johnson, Eric G.Volume:
4984
Year:
2003
Language:
english
DOI:
10.1117/12.477839
File:
PDF, 707 KB
english, 2003