![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Micromachining and Microfabrication Process Technology VIII - Novel MEMS technology based silicon and polymer hybrid actuator and applications as a tunable filter in telecom and in IR chemical detector
Li, Ping, Lee, Kusol, Wang, Weijie, Peters, Jon, Yasaitis, John A., Perez-Maher, Mary Ann, Karam, Jean MichelVolume:
4979
Year:
2003
Language:
english
DOI:
10.1117/12.478293
File:
PDF, 335 KB
english, 2003