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SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2003 - Maspalomas, Gran Canaria, Canary Islands, Spain (Monday 19 May 2003)] Smart Sensors, Actuators, and MEMS - Fabrication of nano-interdigitated electrodes
Berdondini, Luca, Kalbac, Martin, Gautsch, Sebastien, Gullo, Maurizio, Staufer, Urs, Koudelka-Hep, Milena, de Rooij, Nico F., Chiao, Jung-Chih, Varadan, Vijay K., Can, CarlesVolume:
5116
Year:
2003
Language:
english
DOI:
10.1117/12.488975
File:
PDF, 243 KB
english, 2003