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SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Emerging Lithographic Technologies VIII - Near-field x-ray lithography to 15 nm
Bourdillon, Antony J., Mackay, R. Scott, Williams, Gwyn P., Vladimirsky, Yuli, Boothroyd, Chris B.Volume:
5374
Year:
2004
Language:
english
DOI:
10.1117/12.529642
File:
PDF, 608 KB
english, 2004