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SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 14 March 2004)] Smart Structures and Materials 2004: Industrial and Commercial Applications of Smart Structures Technologies - Active damping elements for improving the accuracy of a microlithography machine
Holterman, Jan, Anderson, Eric H., de Vries, Theo J.Volume:
5388
Year:
2004
Language:
english
DOI:
10.1117/12.538937
File:
PDF, 752 KB
english, 2004