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SPIE Proceedings [SPIE Smart Materials, Nano-, and Micro-Smart Systems - Sydney, Australia (Sunday 12 December 2004)] Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II - Cure rate and dry etch patterning of thermoset polymers
Montoya, Maria-Jose, Chiao, Jung-Chih, Jamieson, David N., Simon, Darren, Holland, Anthony S., Faraone, Lorenzo, Dzurak, Andrew S., Shanks, RobertVolume:
5650
Year:
2004
Language:
english
DOI:
10.1117/12.582302
File:
PDF, 490 KB
english, 2004