SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 22 January 2005)] Photon Processing in Microelectronics and Photonics IV - Laser doping of germanium
Mahaney, T. J., Fieret, Jim, Herman, Peter R., Muravjov, Andrey V., Dolguikh, Maxim V., Okada, Tatsuo, Arnold, Craig B., Winningham, Thomas A., Peale, Robert E., Bachmann, Friedrich G., Hoving, WillemVolume:
5713
Year:
2005
Language:
english
DOI:
10.1117/12.585470
File:
PDF, 132 KB
english, 2005