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SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 6 March 2005)] Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - Analysis of a nonuniform cantilever beam MOEM accelerometer under closed loop operation
Selvarajan, A., Varadan, Vijay K., Nayak, Jagannath, Srinivas, T., Sastry, D. V. K.Volume:
5763
Year:
2005
Language:
english
DOI:
10.1117/12.602707
File:
PDF, 231 KB
english, 2005