SPIE Proceedings [SPIE Optical Metrology - Munich, Germany...

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SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 13 June 2005)] Nano- and Micro-Metrology - Effect of the refraction index in the diameter estimation of thin metallic wires

Sanchez-Brea, Luis Miguel, Ottevaere, Heidi, DeWolf, Peter, Martinez-Anton, Juan Carlos, Bernabeu, Eusebio, Wiersma, Diederik S.
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Volume:
5858
Year:
2005
Language:
english
DOI:
10.1117/12.612652
File:
PDF, 358 KB
english, 2005
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