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SPIE Proceedings [SPIE 21st European Mask and Lithography Conference - Dresden, Germany (Thursday 16 June 2005)] 21st European Mask and Lithography Conference - Gaussian beam writing strategy: accuracy of using the shape beam simulator SELID for Gaussian beam systems
Tortai, J. H., Thiault, J., Tiron, R., Mollard, L., Haefele, Stephan, Vychub, Sergey, Lewellen, John, Brooker, PeterVolume:
5835
Year:
2005
Language:
english
DOI:
10.1117/12.637286
File:
PDF, 451 KB
english, 2005