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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Interferogram analysis for flatness metrology
Nascov, Victor, Timcu, Adrian, Apostol, Dan, Garoi, Florin, Damian, Victor, Iordache, Iuliana, Logofătu, Petre Cătălin, Iancu, Ovidiu, Manea, Adrian, Schiopu, Paul, Cojoc, DanYear:
2012
Language:
english
DOI:
10.1117/12.639776
File:
PDF, 696 KB
english, 2012