SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] Optical Micro- and Nanometrology in Microsystems Technology II - Adaptive measurement of deformation and shape by compensation using TV holography and digital holography
Kornis, János, Gorecki, Christophe, Asundi, Anand K., Béki, Bence, Séfel, Richárd, Osten, WolfgangVolume:
6995
Year:
2008
Language:
english
DOI:
10.1117/12.782182
File:
PDF, 1.05 MB
english, 2008