SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] MEMS, MOEMS, and Micromachining III - Magnetic actuated FR4 scanners for compact spectrometers
Ataman, Çağlar, Urey, Hakan, Urey, HakanVolume:
6993
Year:
2008
Language:
english
DOI:
10.1117/12.785375
File:
PDF, 317 KB
english, 2008