SPIE Proceedings [SPIE 24th European Mask and Lithography Conference - Dresden, Germany (Monday 21 January 2008)] 24th European Mask and Lithography Conference - Strategies for hybrid techniques of UV lithography and thermal nanoimprint
Wissen, M., Bogdanski, N., Moellenbeck, S., Scheer, H.-C.Volume:
6792
Year:
2008
Language:
english
DOI:
10.1117/12.798935
File:
PDF, 1.68 MB
english, 2008