SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 22 February 2009)] Metrology, Inspection, and Process Control for Microlithography XXIII - An inverse ellipsometric problem for thin film characterization: comparison of different optimization methods

Akbalık, Ayşe, Allgair, John A., Raymond, Christopher J., Soulan, Sébastien, Tortai, Jean-Hervé, Fuard, David, Kone, Issiaka, Hazart, Jérôme, Schiavone, Patrick
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Volume:
7272
Year:
2009
Language:
english
DOI:
10.1117/12.814118
File:
PDF, 299 KB
english, 2009
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