SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 12 April 2010)] Micro-Optics 2010 - Quasi-optical technique for sensing bond quality of silicon wafers
Elhawil, A., Thienpont, Hugo, Van Daele, Peter, Huynen, I., Raskin, J.-P., Mohr, Jürgen, Zappe, Hans, Roda Neve, C., Olbrechts, B., Stiens, J., Vounckx, R.Volume:
7716
Year:
2010
Language:
english
DOI:
10.1117/12.853667
File:
PDF, 16.08 MB
english, 2010