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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 1 August 2010)] Laser Beam Shaping XI - Performance improvements of binary diffractive structures via optimization of the photolithography and dry etch processes
Welch, Kevin, Forbes, Andrew, Lizotte, Todd E., Leonard, Jerry, Jones, Richard D.Volume:
7789
Year:
2010
Language:
english
DOI:
10.1117/12.859893
File:
PDF, 2.00 MB
english, 2010