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SPIE Proceedings [SPIE 1981 Microlithography Conferences - San Jose (Monday 30 March 1981)] Optical Characterization Techniques for Semiconductor Technology - Optical Properties Of Proton Implanted N-Type GaAs
Zavada, J. M., Jenkinson, H. A., Gavanis, T. J., Aspnes, David E., Potter, Roy F., So, Samuel S.Volume:
276
Year:
1981
Language:
english
DOI:
10.1117/12.931694
File:
PDF, 165 KB
english, 1981