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SPIE Proceedings [SPIE 22nd Annual Technical Symposium - San Diego (Monday 28 August 1978)] Advances in Optical Metrology I - Three-Dimensional Inspection By A Revolutionary Optical Surface Measurement Technique
Levine, Seymour S., Gallios, George, Balasubramanian, N., Wyant, James C.Volume:
153
Year:
1978
Language:
english
DOI:
10.1117/12.938222
File:
PDF, 147 KB
english, 1978