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SPIE Proceedings [SPIE O-E/LASE'86 Symp (January 1986, Los Angeles) - Los Angeles, CA (Tuesday 21 January 1986)] Optical Alignment III - A New Surface Measuring Technique Using Phase Retrieval By Amplitude Interferometry
Ulich, Bobby L., Walker, Christopher K., Philips-Walker, Constance E., Davison, Warren B., Davis, John H., Mayer, Charles E., Ruda, Mitchell C.Volume:
608
Year:
1986
Language:
english
DOI:
10.1117/12.976192
File:
PDF, 5.92 MB
english, 1986