SPIE Proceedings [SPIE SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation - San Diego, CA (Sunday 11 July 1993)] Quality and Reliability for Optical Systems - Step-height standard for surface-profiler calibration
Takacs, Peter Z., Li, Michelle X., Furenlid, Karen, Church, Eugene L., Bilbro, James W., Parks, Robert E.Volume:
1993
Year:
1993
Language:
english
DOI:
10.1117/12.164974
File:
PDF, 881 KB
english, 1993