SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Microelectronics Technology and Process Integration - Planar multilevel metallization technologies for ULSI devices
Xu, Zheng, Ngan, Ken, VanGogh, Jim, Mosely, Rod, Tanaka, Yoichiro, Kieu, H., Chen, Fusen E., Raaijmakers, Ivo J., Chen, Fusen E., Murarka, Shyam P.Volume:
2335
Year:
1994
Language:
english
DOI:
10.1117/12.186046
File:
PDF, 763 KB
english, 1994