SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Manufacturing Process Control for Microelectronic Devices and Circuits - Pulse-modulated infrared-laser interferometric thermometry for Si substrate temperature measurement
Kikuchi, Jun, Kurosaki, Ryo, Fujimura, Shuzo, Yano, Hiroshi, Sabnis, Anant G.Volume:
2336
Year:
1994
Language:
english
DOI:
10.1117/12.186778
File:
PDF, 653 KB
english, 1994