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SPIE Proceedings [SPIE Microlithography '90, 4-9 Mar, San Jose - San Jose, CA (Sunday 4 March 1990)] Optical/Laser Microlithography III - Simulation and experimental results in O.6-μm lithography using an I-line stepper
Bauer, Joachim J., Mehr, Wolfgang, Glaubitz, Ulrich, Baborski, H., Haase, Norbert, Mueller, Jens-Ullrich, Pol, VictorVolume:
1264
Year:
1990
Language:
english
DOI:
10.1117/12.20222
File:
PDF, 826 KB
english, 1990