SPIE Proceedings [SPIE Photonics West '97 - San Jose, CA (Saturday 8 February 1997)] Modeling and Simulation of Higher-Power Laser Systems IV - Modeling of a filamental discharge formation and development in ArF excimer laser
Akashi, Haruaki, Sakai, Yosuke, Tagashira, Hiroaki, Takahashi, Nobuaki, Sasaki, Tai, Farrukh, Usamah O., Basu, SantanuVolume:
2989
Year:
1997
Language:
english
DOI:
10.1117/12.273667
File:
PDF, 546 KB
english, 1997