SPIE Proceedings [SPIE Photonics China '98 - Beijing, China (Wednesday 16 September 1998)] Laser Processing of Materials and Industrial Applications II - Deposition of boron-carbon-nitrogen ternary thin films by ion-beam-assisted excimer ablation of B4C target
Ren, ZhongMin, Lu, Yongfeng, Ni, H. Q., He, Z. F., Chan, Daniel S. H., Low, Tohsiew, Gamani, K. R. P., Chen, G. X., Li, Kebin, Deng, ShuShen, Wang, S. C.Volume:
3550
Year:
1998
Language:
english
DOI:
10.1117/12.317935
File:
PDF, 548 KB
english, 1998