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SPIE Proceedings [SPIE SPIE's International Symposium on Optical Science, Engineering, and Instrumentation - San Diego, CA (Sunday 19 July 1998)] Theory and Practice of Surface-Relief Diffraction Gratings: Synchrotron and Other Applications - Fabrication of blazed gratings and grisms utilizing anisotropic etching of silicon
Harada, Tatsuo, Sakuma, Hideo, Fuse, Masaru, McKinney, Wayne R., Palmer, Christopher A.Volume:
3450
Year:
1998
Language:
english
DOI:
10.1117/12.323415
File:
PDF, 1.49 MB
english, 1998