SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] Multilevel Interconnect Technology II - Control of the interaction of metals with fluorinated silicon oxides
Kim, Sara E., Steinbruchel, Christoph O., Kumar, Atul, Bakhru, H., Graef, Mart, Patel, Divyesh N.Volume:
3508
Year:
1998
Language:
english
DOI:
10.1117/12.324045
File:
PDF, 366 KB
english, 1998