SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachining and Microfabrication Process Technology IV - Uniform and simultaneous fabrication of high-precision and high-density orifice, channel, and reservoirs for ink-jet printheads
Yoon, Jun-Bo, Lee, Jae-Duk, Han, Chul-Hi, Yoon, Euisik, Kim, Choong-Ki, Smith, James H.Volume:
3511
Year:
1998
Language:
english
DOI:
10.1117/12.324304
File:
PDF, 3.53 MB
english, 1998