SPIE Proceedings [SPIE Design, Test, and Microfabrication of MEMS/MOEMS - Paris, France (Tuesday 30 March 1999)] Design, Test, and Microfabrication of MEMS and MOEMS - Micro-EDM for silicon microstructure fabrication
Song, Xiaozhong, Reynaerts, Dominiek, Meeusen, Wim, Van Brussel, Hendrik, Courtois, Bernard, Crary, Selden B., Ehrfeld, Wolfgang, Fujita, Hiroyuki, Karam, Jean Michel, Markus, Karen W.Volume:
3680
Year:
1999
Language:
english
DOI:
10.1117/12.341274
File:
PDF, 3.32 MB
english, 1999