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SPIE Proceedings [SPIE 1999 Symposium on Smart Structures and Materials - Newport Beach, CA (Monday 1 March 1999)] Smart Structures and Materials 1999: Smart Electronics and MEMS - LIGA-like process for high-aspect-ratio PZT microstructures
Lee, Gil S., Jin, Yoonyoung, Park, Sangwon, Ajmera, Pratul K., Khan Malek, Chantal G., Wang, Jin T., Tang, F., Varadan, Vijay K.Volume:
3673
Year:
1999
Language:
english
DOI:
10.1117/12.354296
File:
PDF, 1.71 MB
english, 1999