SPIE Proceedings [SPIE International Symposium on Photonics and Applications - Singapore, Singapore (Monday 29 November 1999)] Photonic Systems and Applications in Defense and Manufacturing - Nanolithography by tip-enhanced laser irradiation
Mai, ZhiHong, Lu, Yongfeng, Song, Wen D., Chim, Wai K., Lam, Yee Loy, Ikuta, Koji, Mangir, Metin S.Volume:
3898
Year:
1999
Language:
english
DOI:
10.1117/12.368476
File:
PDF, 3.08 MB
english, 1999