SPIE Proceedings [SPIE Microelectronic and MEMS Technologies - Edinburgh, United Kingdom (Wednesday 30 May 2001)] In-Line Characterization, Yield, Reliability, and Failure Analysis in Microelectronic Manufacturing II - Control of organic contamination in CMOS manufacturing
Buegler, Juergen H., Frickinger, J., Zielonka, G., Pfitzner, Lothar, Ryssel, Heiner, Schottler, M., Kissinger, Gudrun, Weiland, Larg H.Volume:
4406
Year:
2001
Language:
english
DOI:
10.1117/12.425279
File:
PDF, 116 KB
english, 2001