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SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - Seattle, WA (Sunday 7 July 2002)] Interferometry XI: Techniques and Analysis - Inspection of subwavelength structures and zero-order gratings using polarization interferometry
Totzeck, Michael, Tavrov, Alexander V., Kerwien, Norbert, Tiziani, Hans J., Creath, Katherine, Schmit, JoannaVolume:
4777
Year:
2002
Language:
english
DOI:
10.1117/12.472233
File:
PDF, 459 KB
english, 2002