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SPIE Proceedings [SPIE SPIE's 27th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 3 March 2002)] Optical Microlithography XV - 157-nm pellicles: polymer design for transparency and lifetime
French, Roger H., Wheland, Robert C., Qiu, Weiming, Lemon, M. F., Blackman, Gregory S., Zhang, Xun, Gordon, Joe, Liberman, Vladimir, Grenville, A., Kunz, Roderick R., Rothschild, Mordechai, Yen, AnthoVolume:
4691
Year:
2002
Language:
english
DOI:
10.1117/12.474605
File:
PDF, 592 KB
english, 2002