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SPIE Proceedings [SPIE 19th European Conference on Mask Technology for Integrated Circuits and Microcomponts - Sonthofen, Germany (Monday 13 January 2003)] 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Electron-beam mask repair with induced reactions
Koops, Hans W. P., Edinger, Klaus, Bihr, Johannes, Boegli, Volker A., Greiser, Jens, Behringer, Uwe F. W.Volume:
5148
Year:
2003
Language:
english
DOI:
10.1117/12.514972
File:
PDF, 649 KB
english, 2003