SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Improvement of optical method of oxygen-in-silicon characterization and design consideration in measuring setup for detailed nondestructive mapping of interstitial oxygen
Vinetski, Yu. R., Titov, A. G., Trishenkov, M. A., Filachev, Anatoly M., Dirochka, Alexander I.Year:
2012
Language:
english
DOI:
10.1117/12.517412
File:
PDF, 628 KB
english, 2012