SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Optical Microlithography XVII - Synthesis of projection lithography for low-k 1 via interferometry
Cropanese, Frank C., Smith, Bruce W., Bourov, Anatoly, Fan, Yongfa, Estroff, Andrew, Zavyalova, Lena V., Smith, Bruce W.Volume:
5377
Year:
2004
Language:
english
DOI:
10.1117/12.547727
File:
PDF, 403 KB
english, 2004