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SPIE Proceedings [SPIE 11th Annual BACUS Symposium on Photomask Technology - Sunnyvale, United States (Wednesday 25 September 1991)] 11th Annual BACUS Symposium on Photomask Technology - Specifying phase-shift mask image quality parameters
Buck, Peter D., Rieger, Michael L., McGinnis, Kevin C.Volume:
1604
Year:
1992
Language:
english
DOI:
10.1117/12.56954
File:
PDF, 693 KB
english, 1992