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SPIE Proceedings [SPIE Micro - DL Tentative - San Jose, CA (Sunday 1 March 1992)] Integrated Circuit Metrology, Inspection, and Process Control VI - Numerical reference models for optical metrology simulation
Wojcik, Gregory L., Mould, Jr., John, Marx, Egon, Davidson, Mark P., Postek, Jr., Michael T.Volume:
1673
Year:
1992
Language:
english
DOI:
10.1117/12.59785
File:
PDF, 837 KB
english, 1992