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SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Brisbane, Australia (Sunday 11 December 2005)] BioMEMS and Nanotechnology II - Finite element analysis of fluid behavior under micro surface waves
Shi, Yanru, Gao, Weimin, Yu, Zhenxian, Kong, Lingxue, Hsu, Hung-Yao, Nicolau, Dan V.Volume:
6036
Year:
2006
Language:
english
DOI:
10.1117/12.638365
File:
PDF, 377 KB
english, 2006