SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] MEMS/MOEMS Components and Their Applications III - Poly-SiGe MEMS actuators for adaptive optics
Lin, Blake C., King, Tsu-Jae, Muller, Richard S., Olivier, Scot S., Tadigadapa, Srinivas A., Henning, Albert K.Volume:
6113
Year:
2006
Language:
english
DOI:
10.1117/12.652247
File:
PDF, 275 KB
english, 2006